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Vertical multiple-slot waveguide ring resonators in silicon nitride
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9008-8402
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2008 (English)In: Optics Express, ISSN 1094-4087, Vol. 16, no 22, 17237-17242 p.Article in journal (Refereed) Published
Abstract [en]

This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 mu m, 90 mu m and 110 mu m) have been carried out for TE and TM polarizations at the wavelength of 1.3 mu m. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

Place, publisher, year, edition, pages
2008. Vol. 16, no 22, 17237-17242 p.
Keyword [en]
URN: urn:nbn:se:kth:diva-12211DOI: 10.1364/OE.16.017237ISI: 000260865900011ScopusID: 2-s2.0-55349096822OAI: diva2:305949
QC20100715Available from: 2010-03-25 Created: 2010-03-25 Last updated: 2010-07-15Bibliographically approved
In thesis
1. Integrated Optical Slot-Waveguide Ring Resonator Sensor Arrays for Lab-on-Chip Applications
Open this publication in new window or tab >>Integrated Optical Slot-Waveguide Ring Resonator Sensor Arrays for Lab-on-Chip Applications
2010 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis treats the development of an integrated optical sensor array. The sensors are slot-waveguide ring resonators, integrated with on-chip surface grating couplers and light splitters, for alignment tolerant, real-time, refractive index sensing, and label-free biosensing. The work includes: the design of components and system layouts, the development of fabrication methods, the fabrication of sensor chips, the characterization of the chips, and the development of physical system models for accurate extraction of resonance wavelengths in measured spectra.

The main scientific achievements include: The evaluation of a novel type of nano-structured optical waveguide for biochemical sensing. The realization of an array of such slot-waveguide sensors, integrated with microfluidic sample handling, for multiplex assays. The first study of the thermal behavior of slot-waveguide sensors and the discovery of unique temperature compensation capabilities.

From an application perspective, the use of alignment tolerant surface gratings to couple light into the optical chip enables quick replacement of cartridges in the read-out instrument. Furthermore, the fabrication sequence avoids polishing of individual chips, and thus ensures that the cost benefits of silicon batch micro-fabrication can be leveraged in mass production.

The high sensitivity of the slot waveguide resonators, combined with on-chip referencing and physical modeling, yields low limits of detection. The obtained volume refractive index detection limit of 5 × 10−6 refractive index units (RIU), and the surface mass density detection limit of 0.9 pg/mm2, shows that performance comparable to that of commercial non-integrated surface plasmon resonance sensors, made from bulk optical components, canbe achieved in a compact cartridge.

Place, publisher, year, edition, pages
Stockholm: KTH, 2010. xvii, 98 p.
Trita-EE, ISSN 1653-5146
biosensor, label-free biosensing, ring resonator, optical waveguide, lab-on-a-chip
National Category
Control Engineering Telecommunications
urn:nbn:se:kth:diva-12214 (URN)978-91-7415-594-5 (ISBN)
Public defence
2010-04-16, F3, Lindstedtsvägen 26, KTH, Stockholm, 10:15 (English)
Qc20100715Available from: 2010-04-06 Created: 2010-03-25 Last updated: 2010-07-15Bibliographically approved

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Gylfason, Kristinn BjörgvinSohlström, Hans
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