Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits
2010 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 35, no 8, 1290-1292 p.Article in journal (Refereed) Published
We present design, fabrication, and characterization of a silicon-on-insulator grating coupler of high efficiency for coupling between a silicon nanophotonic waveguide and a single mode fiber. By utilizing the lag effect of the dry etching process, a grating coupler consisting of nonuniform grooves with different widths and depths is designed and fabricated to maximize the overlapping between the upward wave and the fiber mode. The measured waveguide-to-fiber coupling efficiency of 64% (−1.9 dB) for the transverse electric polarization is achieved by the present nonuniform grating coupler directly defined on a regular silicon-on-insulator wafer.
Place, publisher, year, edition, pages
2010. Vol. 35, no 8, 1290-1292 p.
IdentifiersURN: urn:nbn:se:kth:diva-13073DOI: 10.1364/OL.35.001290ISI: 000276861100059ScopusID: 2-s2.0-77954911525OAI: oai:DiVA.org:kth-13073DiVA: diva2:320605
QC 201009062010-05-262010-05-262014-09-24Bibliographically approved