Smart individual switch addressing of 5×5 and 20×20 MEMS double-switch arrays
2007 (English)In: TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE , 2007, 153-156 p.Conference paper (Other academic)
This paper presents a smart row / column addressing scheme for large MEMS rnicroswitch arrays, utilizing the pull-in / pull-out hysteresis of their electrostatic actuators to efficiently reduce the number of control lines. Single-chip 20 x 20 double-switch switch arrays with individually programmable 400 switch elements have been fabricated and the smart addressing scheme was successfully evaluated. The reproducibility of the actuation voltages within the array is very important for this addressing scheme and therefore the influence of effects such as isolation layer charging on the pull-in voltages has also been investigated.
Place, publisher, year, edition, pages
IEEE , 2007. 153-156 p.
MEMS switches, switch arrays, individual addressing, electrostatic actuators
IdentifiersURN: urn:nbn:se:kth:diva-13760DOI: 10.1109/SENSOR.2007.4300094ISI: 000249603700037ScopusID: 2-s2.0-50049096469ISBN: 978-142440842-9ISBN: 1424408423OAI: oai:DiVA.org:kth-13760DiVA: diva2:327181
14th International Conference on Solid-State Sensors, Actuators and Microsystems Lyon, France, JUN 10-14, 2007
QC 201412082010-06-282010-06-282014-12-08Bibliographically approved