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Accuracy of quasi-static simulation methods as compared to full-dynamic analysis of nonlinear electrostatic MEMS actuators
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
2007 (English)In: PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS: VOLS 1 AND 2, New York: Ieee , 2007, 5-8 p.Conference paper, Published paper (Refereed)
Abstract [en]

Quasi-static numerical methods are much wider used for simulating MEMS devices as compared to full-dynamic analysis. Quasi-static models are uncomplicated to set up and have shorter simulation times. Furthermore, it is assumed that the inertia of moving masses can be neglected in MEMS devices because of their tininess. This paper investigates whether kinetic energies plays an important role in elastomechanics/electrostatics coupled-domain analysis since especially electrostatic actuators are characterized by very large actuation and thus acceleration forces. It is found that for certain actuator configurations, the dynamic behavior affects even apparently static parameters such as the pull-in threshold voltage of electrostatic actuators, especially when considering their high degree of nonlinearity. The paper identifies the most relevant device parameters and investigates their influence on the accuracy of the simulation results of quasi-static methods as compared to full-dynamic analysis. Based on these findings, the paper provides with practical guidelines on the choice of the appropriate simulation method depending on the device configuration. Moreover, the paper provides an error estimation of the simulation results obtained by quasi-static methods, using full-dynamic analysis as the reference.

Place, publisher, year, edition, pages
New York: Ieee , 2007. 5-8 p.
Series
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS, ISSN 1084-6999
National Category
Information Science
Identifiers
URN: urn:nbn:se:kth:diva-13785ISI: 000255867800002Scopus ID: 2-s2.0-52249098590ISBN: 1084-6999 978-1-4244-0950-1 (print)OAI: oai:DiVA.org:kth-13785DiVA: diva2:327263
Conference
20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) Kobe, JAPAN, JAN 21-25, 2007
Note
QC 2010-06-28Available from: 2010-06-28 Created: 2010-06-28 Last updated: 2010-06-28Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
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