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Numerical algorithm for quasi-static nonlinear simulation of touch-mode actuators with complex geometries and pre-stressed materials
KTH, School of Electrical Engineering (EES), Microsystem Technology.
Nanyang Technological University (NTU), Singapore.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
2005 (English)In: Transducers '05, Digest of Technical Papers, Vols 1 and 2, New York: Ieee , 2005, 2119-2122 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on a numerical algorithm for quasistatic dynamic modeling of highly nonlinear electrostatic actuators with single-side clamped moving elements, such as curved-electrode actuators or zipperlike touch-mode actuators. The algorithm is capable of simulating pre-stressed materials and touching surfaces with complex geometries of the moving and the rigid structures, including stoppers and thickness variations of the moving parts. In contrast to conventional, very time-consuming simulation methods, the proposed algorithm takes only a fraction of a second which makes it a very powerful design tool for parameter-optimization of the actuator geometry. The paper describes the algorithm, implemented in MATLAB, and reports on its performance evaluation, comparing its simulation results with those obtained by other methods such as simplified analytical models, FEM/BEM/FCM/BCM-simulations and measurements of fabricated structures, including laterally moving MEMS switches and vertically closing pre-stressed thin-film zipper-actuators. The algorithm shows good agreement with measurements and results obtained by these methods.

Place, publisher, year, edition, pages
New York: Ieee , 2005. 2119-2122 p.
Keyword [en]
curved-electrode actuator, MEMS simulation, quasi-static modeling, touch-mode actuator, fabrication, mems
Identifiers
URN: urn:nbn:se:kth:diva-13792ISI: 000232189100524Scopus ID: 2-s2.0-27544477829ISBN: 0-7803-8994-8 (print)OAI: oai:DiVA.org:kth-13792DiVA: diva2:327433
Conference
13th International Conference on Solid-State Sensors, Actuators and Microsystems Seoul, SOUTH KOREA, JUN 05-09, 2005
Note
QC 2010-06-26Available from: 2010-06-29 Created: 2010-06-29 Last updated: 2010-07-01Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
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  • Other locale
More languages
Output format
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