Change search
ReferencesLink to record
Permanent link

Direct link
S-shaped film actuator for low-voltage high-isolation mems metal contact switches
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2004 (English)In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, New York: Ieee , 2004, 637-640 p.Conference paper (Refereed)
Abstract [en]

In this paper we present a novel metal-contact MEMS series switch based on a S-shaped film actuator. The switch consists of a flexible membrane rolling between a top and a bottom electrode. The s-shape of the film ensures that the membrane is always in close contact with both top and bottom electrodes, which results in a design with very low actuation voltages independent of the switching contact distance in the off-state. Thus, large switching areas are possible without decreased RF isolation. Furthermore, the design provides with active-opening capability making it less susceptible for stiction and self-actuation mechanisms. The switch is fabricated on two different substrates and finally assembled, leading to a near hermetic package integrated switch. The device was successfully fabricated and both the actuator and the RF performance of prototypes were characterized.

Place, publisher, year, edition, pages
New York: Ieee , 2004. 637-640 p.
Keyword [en]
National Category
Information Science
URN: urn:nbn:se:kth:diva-13793ISI: 000189435200158ScopusID: 2-s2.0-3042779979ISBN: 1084-6999 0-7803-8265-XOAI: diva2:327455
17th IEEE International Conference on Micro Electro Mechanical Systems Maastricht, NETHERLANDS, JAN 25-29, 2004.
QC 2010-06-29Available from: 2010-06-29 Created: 2010-06-29 Last updated: 2010-06-29Bibliographically approved

Open Access in DiVA

No full text

Other links

ScopusIEEE Xplore

Search in DiVA

By author/editor
Oberhammer, JoachimStemme, Göran
By organisation
Signals, Sensors and Systems
Information Science

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 19 hits
ReferencesLink to record
Permanent link

Direct link