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S-shaped film actuator for low-voltage high-isolation mems metal contact switches
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2004 (English)In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, New York: Ieee , 2004, 637-640 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this paper we present a novel metal-contact MEMS series switch based on a S-shaped film actuator. The switch consists of a flexible membrane rolling between a top and a bottom electrode. The s-shape of the film ensures that the membrane is always in close contact with both top and bottom electrodes, which results in a design with very low actuation voltages independent of the switching contact distance in the off-state. Thus, large switching areas are possible without decreased RF isolation. Furthermore, the design provides with active-opening capability making it less susceptible for stiction and self-actuation mechanisms. The switch is fabricated on two different substrates and finally assembled, leading to a near hermetic package integrated switch. The device was successfully fabricated and both the actuator and the RF performance of prototypes were characterized.

Place, publisher, year, edition, pages
New York: Ieee , 2004. 637-640 p.
Series
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
Keyword [en]
rf-mems
National Category
Information Science
Identifiers
URN: urn:nbn:se:kth:diva-13793ISI: 000189435200158Scopus ID: 2-s2.0-3042779979ISBN: 1084-6999 0-7803-8265-X (print)OAI: oai:DiVA.org:kth-13793DiVA: diva2:327455
Conference
17th IEEE International Conference on Micro Electro Mechanical Systems Maastricht, NETHERLANDS, JAN 25-29, 2004.
Note
QC 2010-06-29Available from: 2010-06-29 Created: 2010-06-29 Last updated: 2010-06-29Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf