S-shaped film actuator for low-voltage high-isolation mems metal contact switches
2004 (English)In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, New York: Ieee , 2004, 637-640 p.Conference paper (Refereed)
In this paper we present a novel metal-contact MEMS series switch based on a S-shaped film actuator. The switch consists of a flexible membrane rolling between a top and a bottom electrode. The s-shape of the film ensures that the membrane is always in close contact with both top and bottom electrodes, which results in a design with very low actuation voltages independent of the switching contact distance in the off-state. Thus, large switching areas are possible without decreased RF isolation. Furthermore, the design provides with active-opening capability making it less susceptible for stiction and self-actuation mechanisms. The switch is fabricated on two different substrates and finally assembled, leading to a near hermetic package integrated switch. The device was successfully fabricated and both the actuator and the RF performance of prototypes were characterized.
Place, publisher, year, edition, pages
New York: Ieee , 2004. 637-640 p.
, PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
IdentifiersURN: urn:nbn:se:kth:diva-13793ISI: 000189435200158ScopusID: 2-s2.0-3042779979ISBN: 1084-6999 0-7803-8265-XOAI: oai:DiVA.org:kth-13793DiVA: diva2:327455
17th IEEE International Conference on Micro Electro Mechanical Systems Maastricht, NETHERLANDS, JAN 25-29, 2004.
QC 2010-06-292010-06-292010-06-292010-06-29Bibliographically approved