Passive contact force and active opening force electrostatic switches for soft metal contact materials
2006 (English)In: MEMS 2006: 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, New York: Ieee , 2006, 162-165 p.Conference paper (Refereed)
Firstly, this paper discusses why the "conventional", most-commonly used electrostatic switch concept based on a deflected cantilever is not very suitable for soft metal contact materials, since it creates only a weak release force not sufficient for overcoming the adhesion force between soft metal contacts, and its contact force is typically stronger than necessary for soft contact materials. Secondly, this paper presents a mechanically bi-stable, electrostatically actuated switch concept with a large active opening force and a small passive closing force, adapted to the contact and adhesion force requirements of soft contact materials such as gold. The theoretical discussion of the two concepts is supported by simulation results, by measurements of fabricated devices, and by an analysis of switches published in the literature.
Place, publisher, year, edition, pages
New York: Ieee , 2006. 162-165 p.
, PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
mems switches, microrelays, actuators
IdentifiersURN: urn:nbn:se:kth:diva-13790ISI: 000236994500041ScopusID: 2-s2.0-33750137670ISBN: 1084-6999 0-7803-9475-5OAI: oai:DiVA.org:kth-13790DiVA: diva2:327507
19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Istanbul, TURKEY, JAN 22-26, 2006
QC 2010-06-292010-06-292010-06-292010-06-29Bibliographically approved