Mechanically tri-stable in-line single-pole-double-throw all-metal switch
2006 (English)In: MEMS 2006: 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, New York: Ieee , 2006, 898-901 p.Conference paper (Refereed)
This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off, 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.
Place, publisher, year, edition, pages
New York: Ieee , 2006. 898-901 p.
, PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
IdentifiersURN: urn:nbn:se:kth:diva-13789ISI: 000236994500225ScopusID: 2-s2.0-33750009555ISBN: 1084-6999 0-7803-9475-5OAI: oai:DiVA.org:kth-13789DiVA: diva2:327517
19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Istanbul, TURKEY, JAN 22-26, 2006
QC 201006292010-06-292010-06-292010-06-29Bibliographically approved