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Mechanically tri-stable in-line single-pole-double-throw all-metal switch
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
2006 (English)In: MEMS 2006: 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, New York: Ieee , 2006, 898-901 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off, 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.

Place, publisher, year, edition, pages
New York: Ieee , 2006. 898-901 p.
Series
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
National Category
Information Science
Identifiers
URN: urn:nbn:se:kth:diva-13789ISI: 000236994500225Scopus ID: 2-s2.0-33750009555ISBN: 1084-6999 0-7803-9475-5 (print)OAI: oai:DiVA.org:kth-13789DiVA: diva2:327517
Conference
19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Istanbul, TURKEY, JAN 22-26, 2006
Note
QC 20100629Available from: 2010-06-29 Created: 2010-06-29 Last updated: 2010-06-29Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
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  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
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