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A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
2005 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 14, no 2, 200-206 p.Article in journal (Refereed) Published
Abstract [en]

Seat microvalves are the most common microvalve type for gas-flow control. This paper presents a general method for optimizing the flow capacity of a seat valve nozzle and diminishing the requirements on the valve actuator's stroke length. Geometrical analysis and finite element (FE) simulations show that for controlling large gas flow at elevated pressure, the optimal nozzle design in terms of flow capacity for a given actuator performance is a multiple-orifice arrangement with miniaturized circular nozzles. Experimental results support the design introduced in this paper.

Place, publisher, year, edition, pages
2005. Vol. 14, no 2, 200-206 p.
Keyword [en]
flow optimization, flow simulation, microvalve, nozzle
National Category
Fluid Mechanics and Acoustics
URN: urn:nbn:se:kth:diva-14669DOI: 10.1109/jmems.839018ISI: 000228308600003ScopusID: 2-s2.0-18844400289OAI: diva2:332710

QC 20100525 QC 20111118

Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2015-09-24Bibliographically approved

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van der Wijngaart, WouterStemme, Göran
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