Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements
2005 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 14, no 2, 254-260 p.Article in journal (Refereed) Published
In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor.
Place, publisher, year, edition, pages
2005. Vol. 14, no 2, 254-260 p.
aluminum, anemometers, assembly, hotwire, microassembly, microsensors, wall shear stress
IdentifiersURN: urn:nbn:se:kth:diva-14670DOI: 10.1109/jmems.2004.839029ISI: 000228308600009ScopusID: 2-s2.0-18844373064OAI: oai:DiVA.org:kth-14670DiVA: diva2:332711
QC 201005252010-08-052010-08-052010-10-19Bibliographically approved