Fabrication and characterization of thin Delta E detectors for spectroscopic application
2005 (English)In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, Vol. 546, no 1-2, 312-318 p.Article in journal (Refereed) Published
Ultra-thin Delta Edetectors for spectroscopic applications have been fabricated and characterized down to a thickness of 4.5 mu m. A common one-side mask aligner was used to fabricate the detectors. The detectors display low leakage current and the resulting capacitance is close to the detector window capacitance below a threshold voltage. The detector telescope needs to be slightly tilted to reduce the probability for channeling. However, even better control of the thickness uniformity is needed to improve the resolution in the Delta E-E detector telescope.
Place, publisher, year, edition, pages
2005. Vol. 546, no 1-2, 312-318 p.
thin silicon detector, Delta E detector, energy straggling, ion channeling, chicsi
IdentifiersURN: urn:nbn:se:kth:diva-14894DOI: 10.1016/j.nima.2005.03.053ISI: 000230288200058ScopusID: 2-s2.0-20444468547OAI: oai:DiVA.org:kth-14894DiVA: diva2:332935
QC 20100525 QC 201110112010-08-052010-08-052011-10-11Bibliographically approved