Change search
ReferencesLink to record
Permanent link

Direct link
Annealing study of Sb+ and Al+ ion-implanted ZnO
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-8760-1137
Show others and affiliations
2005 (English)In: Superlattices and Microstructures, ISSN 0749-6036, E-ISSN 1096-3677, Vol. 38, no 4-6, 464-471 p.Article in journal (Refereed) Published
Abstract [en]

In this work we have studied diffusion and electrical activation in Al+ and Sb+ implanted ZnO samples using secondary ion mass spectrometry (SIMS), scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy (SCM). The samples were hydrothermally grown and post-implant annealing was performed at 800, 900 and 1000 degrees C in pure oxygen atmosphere, After each annealing step the samples were characterized with SSRM/SCM and SIMS. The thermal treatments did not induce any significant impurity redistribution as measured by SIMS, while electrical compensation is observed by SSRM/SCM for the Sb-implanted sample yielding less n-doping than in the as-grown samples. In the Al-implanted samples, an increase in carrier concentration is observed; we ascribe this to Al-related donors and possibly interstitial lithium, a common residual impurity in the samples that have been shown to be very mobile by SIMS.

Place, publisher, year, edition, pages
2005. Vol. 38, no 4-6, 464-471 p.
Keyword [en]
scanning capacitance microscopy, films
National Category
Physical Sciences
URN: urn:nbn:se:kth:diva-15220DOI: 10.1016/j.spmi.2005.08.017ISI: 000233651800029ScopusID: 2-s2.0-33644541418OAI: diva2:333261
QC 20100525 QC 20111012Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2011-10-12Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Hallén, Anders.
By organisation
Microelectronics and Information Technology, IMIT
In the same journal
Superlattices and Microstructures
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 42 hits
ReferencesLink to record
Permanent link

Direct link