Using deep level transient spectroscopy (DLTS), we have studied the energy position and thermal stability of deep levels in nitrogen doped 4H-SiC epitaxial layers after 1.2 MeV proton implantation and 15 MeV electron irradiation. Isochronal annealing was performed at temperatures from 100 to 1200 degrees C in steps of 50 degrees C. The DLTS measurements, which were carried out in the temperature range from 120 to 630 K after each annealing step, reveal the presence of ten electron traps located in the energy range of 0.45-1.6 eV below the conduction band edge (E-c). Of these ten levels, three traps at 0.69, 0.73, and 1.03 eV below E-c, respectively, are observed only after proton implantation. Dose dependence and depth profiling studies of these levels have been performed. Comparing the experimental data with computer simulations of the implantation and defects profiles, it is suggested that these three new levels, not previously reported in the literature, are hydrogen related. In particular, the E-c-0.73 eV level displays a very narrow depth distribution, confined within the implantation profile, and it originates most likely from a defect involving only one H atom.
2005. Vol. 98, no 11