Microfabrication of epitaxial La1-x(Sr,Ca)(x)MnO3 IR bolometer on Si
2006 (English)In: Integrated Ferroelectrics, ISSN 1058-4587, Vol. 80, 47-54 p.Article in journal (Refereed) Published
Self supported free standing heteroepitaxial La1-x(Sr,Ca)(x)MnO3 (LSCMO) membranes grown on Bi4Ti3O12(BTO)/CeO2/YSZ buffered Si substrates have been microfabricated by Ar ion beam etching (IBE) and SF6/C4F8 inductively Coupled plasma (ICP) etching technique. The electrical property of free standing membrane was compared to as-grown sample by four point measurement. These results demonstrate feasibility to use heteroepitaxial oxide film structures with conventional photoresist patterning as thermally isolated membranes for infrared microbolometers.
Place, publisher, year, edition, pages
2006. Vol. 80, 47-54 p.
microfabrication, manganite, free stanching membrane, uncooled infrared bolometer, Ar ion beam etching, photoresist, films, silicon
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-15799DOI: 10.1080/10584580600656171ISI: 000238680700007ScopusID: 2-s2.0-33745740848OAI: oai:DiVA.org:kth-15799DiVA: diva2:333841
QC 20100525, QC 20110929. Conference: 17th International Symposium on Integrated Ferroelectrics. Shanghai, PEOPLES R CHINA. APR 17-20, 2005 2010-08-052010-08-052011-09-29Bibliographically approved