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Ion implantation damage annealing in 4H-SiC monitored by scanning spreading resistance microscopy
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-8760-1137
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.ORCID iD: 0000-0002-0292-224X
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.
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2006 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 515, no 2, 611-614 p.Article in journal (Refereed) Published
Abstract [en]

To obtain a better understanding of the damage annealing process and dopant defect incorporation and activation we have implanted epitaxially grown 4H-SiC layers with high doses of Al+ ions. Cross-sections of the samples are investigated by scanning spreading resistance microscopy (SSRM) using a commercial atomic force microscopy (AFM). The defects caused by the implanted ions compensate for the doping and decrease the charge carrier mobility. This causes the resistivity to increase in the as-implanted regions. The calculated profile of implanted ions is in good agreement with the measured ones and shows a skewed Gaussian shape. Implanted samples are annealed up to 400 degrees C. Despite these low annealing temperatures we observe a clear improvement of the sample conductivity in the asimplanted region.

Place, publisher, year, edition, pages
2006. Vol. 515, no 2, 611-614 p.
Keyword [en]
silicon carbide, SiC, ion implantation, SSRM, acceptor doping, carriers
Identifiers
URN: urn:nbn:se:kth:diva-16056DOI: 10.1016/j.tsf.2005.12.211ISI: 000241220600055Scopus ID: 2-s2.0-33748747867OAI: oai:DiVA.org:kth-16056DiVA: diva2:334098
Note
QC 20100525 QC 20110928. Conference: 12th International Conference on Thin Films. BRATISLAVA, SLOVAKIA. SEP 15-20, 2002.Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2011-09-29Bibliographically approved

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Hallén, Anders.Linnarsson, Margareta KKarlsson, Ulf O.

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