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Mechanically tri-stable, true single-pole-double-throw (SPDT) switches
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
2006 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 16, no 11, 2251-2258 p.Article in journal (Refereed) Published
Abstract [en]

This paper reports on a mechanically tri-stable switch mechanism based on laterally moving electrostatic curved-electrode actuators. The switch is configured in a 'true' single-pole-double-throw configuration (SPDT), i.e. a single-switch mechanism allows for the input signal to be switched between two output ports. The switch has three stable states: ( 1) input to first output; ( 2) switch off; ( 3) input to second output. Because of a latching mechanism, these states are mechanically stable, i.e. they are maintained without applying external actuation energy. The fabrication of the switches is done by a single photolithographical step and deep etching of a silicon-on-glass wafer which is subsequently coated with sputtered gold. The switch design features active opening, and the contact force is created passively by the deflected cantilevers. The curved-electrode actuators are utilized close to their end position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction. The actuation voltages for different designs and functions of the switches are between 30 and 85 V.

Place, publisher, year, edition, pages
2006. Vol. 16, no 11, 2251-2258 p.
Keyword [en]
rf mems switch, low-voltage, actuators, design
URN: urn:nbn:se:kth:diva-16138DOI: 10.1088/0960-1317/16/11/001ISI: 000242169500001ScopusID: 2-s2.0-33750591275OAI: diva2:334180
QC 20100525Available from: 2010-08-05 Created: 2010-08-05Bibliographically approved

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Oberhammer, JoachimStemme, Göran
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