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A low-temperature thermopneumatic actuation principle for gas bubble microvalves
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
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2007 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 16, no 3, 765-774 p.Article in journal (Refereed) Published
Abstract [en]

We introduce a novel type of microfluidic actuator in which a trapped air bubble functions as the thermally controlled volume displacing element. The pressure of the trapped air pocket is controlled by the changing equilibrium gas composition for static operation and by thermal expansion for dynamic operation. The volume displacement is determined by the liquid surface tension and the valve geometry. A fully functional demonstrator device was successfully fabricated and tested. The absence of moving mechanical parts, the electrical control of the valve, and the limited required actuation temperature make the actuator suitable for control of large-scale integration fluidic networking in biotechnical applications.

Place, publisher, year, edition, pages
IEEE Press, 2007. Vol. 16, no 3, 765-774 p.
Keyword [en]
bubble valve, microfluidics, microvalve, surface tension, thermopneumatic
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-16690DOI: 10.1109/jmems.2007.893514ISI: 000247219200031Scopus ID: 2-s2.0-34547736592OAI: oai:DiVA.org:kth-16690DiVA: diva2:334733
Note

QC 20100525 QC 20111118

Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2017-12-12Bibliographically approved

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fulltext(1146 kB)52 downloads
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van der Wijngaart, WouterStemme, Göran

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