Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Thin film crystal growth template removal: Application to stress reduction in lead zirconate titanate microstructures
KTH, School of Electrical Engineering (EES), Microsystem Technology.
Show others and affiliations
2007 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 91, no 16Article in journal (Refereed) Published
Abstract [en]

A key issue for the design and reliability of microdevices is process related; residual stresses in the thin films from which they are composed, especially for sol-gel deposited Pb (Zr-x, Ti1- x) O-3 ceramics, where use of Pt as a template layer, though essential for the nucleation of the perovskite phase, results in structures with high levels of stress largely fixed by the thermal expansion coefficient mismatch between Pt and Si. Here a technique for the elimination of this stress is presented, involving the use of adhesive wafer bonding and bulk micromachining procedures to remove the Pt layer following the Pb (Zr-x, Ti1-x)O-3 deposition.

Place, publisher, year, edition, pages
2007. Vol. 91, no 16
Keyword [en]
residual-stress, pt/ti bilayer, stacks
Identifiers
URN: urn:nbn:se:kth:diva-17051DOI: 10.1063/1.2801386ISI: 000250295700083Scopus ID: 2-s2.0-35548931134OAI: oai:DiVA.org:kth-17051DiVA: diva2:335094
Note
QC 20100525Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2017-12-12Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Authority records BETA

Stemme, Göran

Search in DiVA

By author/editor
Oberhammer, JoachimStemme, Göran
By organisation
Microsystem Technology
In the same journal
Applied Physics Letters

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 61 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf