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Anomalous electron transport in high power impulse magnetron sputtering
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2008 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 17, no 2Article in journal (Refereed) Published
Abstract [en]

Oscillating electric fields in the megahertz range have been studied in a high power impulse magnetron sputtering (HIPIMS) plasma with the use of electric field probe arrays. One possible reason for these oscillations to occur is charge perturbation-or so-called modified two-stream instabilities (MTSIs). It is known that MTSIs give rise to acceleration of the charged plasma species and can give a net transport of electrons across the magnetic field lines. Measurements of these oscillations confirm trends, specifically of the frequency dependence on ion mass and magnetic field strength as expected from the theory of MTSI waves. These results help to explain the previously reported anomalous fast electron transport in HIPIMS discharges, where classical theory of diffusion using collisions to transport electrons has failed.

Place, publisher, year, edition, pages
2008. Vol. 17, no 2
Keyword [en]
physical vapor-deposition, density distribution, plasma, discharge, fluctuations, ionization
Identifiers
URN: urn:nbn:se:kth:diva-17585DOI: 10.1088/0963-0252/17/2/025007ISI: 000256543800030Scopus ID: 2-s2.0-43149109071OAI: oai:DiVA.org:kth-17585DiVA: diva2:335629
Note
QC 20100525Available from: 2010-08-05 Created: 2010-08-05 Last updated: 2017-12-12Bibliographically approved

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