Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate
2009 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 34, no 17, 2631-2633 p.Article in journal (Refereed) Published
Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high resolution while maintaining reasonable efficiency. We analyze the illumination conditions necessary for this type of optics in order to suppress stray light and demonstrate microscopic imaging resolving 25 nm features.
Place, publisher, year, edition, pages
2009. Vol. 34, no 17, 2631-2633 p.
IdentifiersURN: urn:nbn:se:kth:diva-18788ISI: 000270114400031ScopusID: 2-s2.0-69549105762OAI: oai:DiVA.org:kth-18788DiVA: diva2:336835
QC 201005252010-08-052010-08-052011-11-14Bibliographically approved