Fabrication and characterization of diffractive optical elements in InP for monolithic integration with surface-emitting components
2000 (English)In: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 39, no 3, 398-401 p.Article in journal (Refereed) Published
We report on the fabrication and subsequent characterization of binary diffractive optical elements (DOE's) in InP for operation at 1.3 mu m. Fresnel lenses of different focal, lengths and a DOE that splits and focuses an incident beam into a 1 x 4 array of spots (optical fan-out) were fabricated. We realized the surface reliefs by patterning resist, using electron-beam lithography and etching with a chemically assisted ion beam, which produced well-defined patterns with smooth sidewalls and little if no surface roughness. The measured efficiency for the lenses was 36%. For the fan-out element the efficiency and the uniformity error were 26% and 30%, respectively. Spot sizes small as 16 mu m were measured.
Place, publisher, year, edition, pages
2000. Vol. 39, no 3, 398-401 p.
laser arrays, kinoform
IdentifiersURN: urn:nbn:se:kth:diva-19492ISI: 000084837700005OAI: oai:DiVA.org:kth-19492DiVA: diva2:338184
QC 201005252010-08-102010-08-10Bibliographically approved