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Fabrication and characterization of diffractive optical elements in InP for monolithic integration with surface-emitting components
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2000 (English)In: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 39, no 3, 398-401 p.Article in journal (Refereed) Published
Abstract [en]

We report on the fabrication and subsequent characterization of binary diffractive optical elements (DOE's) in InP for operation at 1.3 mu m. Fresnel lenses of different focal, lengths and a DOE that splits and focuses an incident beam into a 1 x 4 array of spots (optical fan-out) were fabricated. We realized the surface reliefs by patterning resist, using electron-beam lithography and etching with a chemically assisted ion beam, which produced well-defined patterns with smooth sidewalls and little if no surface roughness. The measured efficiency for the lenses was 36%. For the fan-out element the efficiency and the uniformity error were 26% and 30%, respectively. Spot sizes small as 16 mu m were measured.

Place, publisher, year, edition, pages
2000. Vol. 39, no 3, 398-401 p.
Keyword [en]
laser arrays, kinoform
URN: urn:nbn:se:kth:diva-19492ISI: 000084837700005OAI: diva2:338184
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Landgren, Gunnar.
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Microelectronics and Information Technology, IMIT
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