Kinetic study of InP: Fe growth by LP-HVPE with ferrocene as Fe source
2000 (English)In: Journal of the Electrochemical Society, ISSN 0013-4651, Vol. 147, no 2, 744-746 p.Article in journal (Refereed) Published
A kinetic study of InP:Fe growth has been carried out in a low pressure hydride vapor phase epitaxy (LP-HVPE) reactor using Ferrocene as iron source. The influence of the ferrocene partial pressure on the growth behavior has been investigated. A drastic decrease of the growth rate in the presence of ferrocene has been experimentally measured. This effect is explained to be due to cyclopentadiene adsorption. A kinetic model, that takes into account this adsorption, is proposed, which explains the observed experimental results.
Place, publisher, year, edition, pages
2000. Vol. 147, no 2, 744-746 p.
IdentifiersURN: urn:nbn:se:kth:diva-19533ISI: 000085294400056OAI: oai:DiVA.org:kth-19533DiVA: diva2:338225
QC 201005252010-08-102010-08-10Bibliographically approved