A robust micro conveyer realized by arrayed polyimide joint actuators
2000 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 10, no 3, 337-349 p.Article in journal (Refereed) Published
A new micro-robotic conveyance system based on arrays of movable robust silicon legs has been developed and investigated. Motion is achieved by thermal expansion in polyimide joint actuators using electrical heating. Successful experiments on moving and rotating flat objects in the millimeter range have been performed with high load capacity. The conveyer consists of a 15 x 5 mm(2) chip having 12 silicon legs, each with a length of 500 mu m. The maximum load conveyed on the structure was 3500 mg. Both transverse and rotational movements have been demonstrated experimentally. Conveyance velocities up to 12 mm s(-1) have been measured. Accelerated lifetime measurements demonstrate the long-term stability of the actuators. The functionality of the: polyimide joint actuators is unaffected after more than 2 x 10(8) load cycles.
Place, publisher, year, edition, pages
2000. Vol. 10, no 3, 337-349 p.
micromachined silicon plates, polyimide, microrobots, objects, system, mems
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-20042DOI: 10.1088/0960-1317/10/3/307ISI: 000089362900008OAI: oai:DiVA.org:kth-20042DiVA: diva2:338735
QC 20100525 QC 201112202010-08-102010-08-102011-12-20Bibliographically approved