Stability of droplet-target laser-plasma soft x-ray sources
2000 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 88, no 9, 5421-5425 p.Article in journal (Refereed) Published
The spatial stability of microscopic target droplets used for laser-plasma soft x-ray generation in vacuum is investigated. A long-term drift in drop position is characterized with an ultrafast laser-diode imaging system. The drift is experimentally and theoretically shown to be due to a temperature-induced increase in target-liquid viscosity as a result of evaporation. Finally, the drift is compensated for and stable, long-term unattended operation of the source is demonstrated with an automatic phase-delay drop-to-laser synchronizing system. This is important for future compact lithography and microscopy systems.
Place, publisher, year, edition, pages
2000. Vol. 88, no 9, 5421-5425 p.
ink-jet, debris, generation, emission
IdentifiersURN: urn:nbn:se:kth:diva-20093ISI: 000089813800078OAI: oai:DiVA.org:kth-20093DiVA: diva2:338786
QC 201005252010-08-102010-08-10Bibliographically approved