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Stability of droplet-target laser-plasma soft x-ray sources
KTH, Superseded Departments, Physics.ORCID iD: 0000-0003-2723-6622
2000 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 88, no 9, 5421-5425 p.Article in journal (Refereed) Published
Abstract [en]

The spatial stability of microscopic target droplets used for laser-plasma soft x-ray generation in vacuum is investigated. A long-term drift in drop position is characterized with an ultrafast laser-diode imaging system. The drift is experimentally and theoretically shown to be due to a temperature-induced increase in target-liquid viscosity as a result of evaporation. Finally, the drift is compensated for and stable, long-term unattended operation of the source is demonstrated with an automatic phase-delay drop-to-laser synchronizing system. This is important for future compact lithography and microscopy systems.

Place, publisher, year, edition, pages
2000. Vol. 88, no 9, 5421-5425 p.
Keyword [en]
ink-jet, debris, generation, emission
URN: urn:nbn:se:kth:diva-20093ISI: 000089813800078OAI: diva2:338786
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Hertz, Hans M.
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