A surface-micromachined resonant-beam pressure-sensing structure
2001 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 10, no 4, 498-502 p.Article in journal (Refereed) Published
The first study on an entirely surface-micromachined resonant-beam pressure sensor is presented. Using a fully surface-micromachined process, an encapsulated beam resonant pressure-sensor structure with a pressure-sensitive diaphragm of 100 x 150 x 2 mum has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter-mounted intravascular blood pressure sensors. The pressure sensitivity is measured at 3.2 %/bar with a beam resonance frequency of about 700 kHz.
Place, publisher, year, edition, pages
2001. Vol. 10, no 4, 498-502 p.
catheter, force transducing beam, MEMS, miniaturized, pressure sensor, resonant, surface micromachined, sensor
IdentifiersURN: urn:nbn:se:kth:diva-21129DOI: 10.1109/84.967371ISI: 000172387900003OAI: oai:DiVA.org:kth-21129DiVA: diva2:339826
QC 201005252010-08-102010-08-102010-10-19Bibliographically approved