Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Media protected surface micromachined leverage beam pressure sensor
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2001 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 11, no 6, 617-622 p.Article in journal (Refereed) Published
Abstract [en]

In this paper we present the first surface micromachined ultraminiaturized, highly sensitive, pressure sensor that utilizes a force-transducing beam and a 2 mum thick polysilicon pressure sensing diaphragm as an encapsulation layer for high media isolation of the sensing piezoresistor. A beam is attached to the diaphragm at one end and to the cavity at the other end. The pressure-induced diaphragm deflection is transduced to strain in the beam and sensed by a piezoresistive strain-gauge on the beam. The piezoresistor is thus well isolated from the sensing environment. The pressure sensing performance was measured to 0.9 mu V V-1 mmHg(-1).

Place, publisher, year, edition, pages
2001. Vol. 11, no 6, 617-622 p.
Identifiers
URN: urn:nbn:se:kth:diva-21148DOI: 10.1088/0960-1317/11/6/301ISI: 000172523900001OAI: oai:DiVA.org:kth-21148DiVA: diva2:339845
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Stemme, Göran

Search in DiVA

By author/editor
Stemme, Göran
By organisation
Signals, Sensors and Systems
In the same journal
Journal of Micromechanics and Microengineering

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 28 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf