Media protected surface micromachined leverage beam pressure sensor
2001 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 11, no 6, 617-622 p.Article in journal (Refereed) Published
In this paper we present the first surface micromachined ultraminiaturized, highly sensitive, pressure sensor that utilizes a force-transducing beam and a 2 mum thick polysilicon pressure sensing diaphragm as an encapsulation layer for high media isolation of the sensing piezoresistor. A beam is attached to the diaphragm at one end and to the cavity at the other end. The pressure-induced diaphragm deflection is transduced to strain in the beam and sensed by a piezoresistive strain-gauge on the beam. The piezoresistor is thus well isolated from the sensing environment. The pressure sensing performance was measured to 0.9 mu V V-1 mmHg(-1).
Place, publisher, year, edition, pages
2001. Vol. 11, no 6, 617-622 p.
IdentifiersURN: urn:nbn:se:kth:diva-21148DOI: 10.1088/0960-1317/11/6/301ISI: 000172523900001OAI: oai:DiVA.org:kth-21148DiVA: diva2:339845
QC 201005252010-08-102010-08-10Bibliographically approved