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Media protected surface micromachined leverage beam pressure sensor
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2001 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 11, no 6, 617-622 p.Article in journal (Refereed) Published
Abstract [en]

In this paper we present the first surface micromachined ultraminiaturized, highly sensitive, pressure sensor that utilizes a force-transducing beam and a 2 mum thick polysilicon pressure sensing diaphragm as an encapsulation layer for high media isolation of the sensing piezoresistor. A beam is attached to the diaphragm at one end and to the cavity at the other end. The pressure-induced diaphragm deflection is transduced to strain in the beam and sensed by a piezoresistive strain-gauge on the beam. The piezoresistor is thus well isolated from the sensing environment. The pressure sensing performance was measured to 0.9 mu V V-1 mmHg(-1).

Place, publisher, year, edition, pages
2001. Vol. 11, no 6, 617-622 p.
URN: urn:nbn:se:kth:diva-21148DOI: 10.1088/0960-1317/11/6/301ISI: 000172523900001OAI: diva2:339845
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Stemme, Göran
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