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Nitrogen bonding structure in carbon nitride thin films studied by soft x-ray spectroscopy
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2001 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 79, no 26, 4348-4350 p.Article in journal (Refereed) Published
Abstract [en]

Soft x-ray absorption (SXAS) and emission (SXES) spectroscopies were applied to study the nitrogen bonding structure in magnetron sputtered CNx thin films. By comparing with calculated spectra of N in different model systems, N in three main bonding environments can be identified: (i) C equivalent toN bonds, with a sharp SXAS peak at 399.5 eV, (ii) pyridine-like N (i.e., N bonded to two C atoms), with an x-ray absorption resonance at similar to 398.5 eV, and (iii) N substituted in graphite, possibly with one sp(3) carbon as a neighbor (SXAS energy similar to 401 eV). These bondings are present in all CNx films analyzed; however, as shown earlier, the relative intensities between the peaks may vary with the growth conditions. Differences in the coordination of the nearest or second nearest C neighbors only cause slight changes in the peak positions and spectrum shape.

Place, publisher, year, edition, pages
2001. Vol. 79, no 26, 4348-4350 p.
Keyword [en]
absorption spectra, high-resolution
URN: urn:nbn:se:kth:diva-21183ISI: 000172815100027OAI: diva2:339880
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Luo, YiÅgren, Hans
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