A free-hanging strain-gauge for ultraminiaturized pressure sensors
2002 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. aug-97, 75-82 p.Article in journal (Refereed) Published
The first entirely surface micromachined free-hanging strain-gauge pressure sensor is presented. The sensing element consists of a 80 pm long H-shaped force transducing beam supported at both ends. The H-shape enables the strain-gauge to be a part of the beam without the need for additional layers. The beam is located beneath and attached at one end to a square polysilicon diaphragm and at the other end to the cavity edge. The diaphragm of the fabricated sensor is 2 mum thick and has a side length of only 100 mum. The new design enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity of the sensor with a H-shaped 0.4 mum thick force transducing beam was measured to be 5 muV/V/mmHg.
Place, publisher, year, edition, pages
2002. Vol. aug-97, 75-82 p.
pressure sensor, miniaturized, force transducing beam, biomedical applications, transducer, catheter
IdentifiersURN: urn:nbn:se:kth:diva-21622DOI: 10.1016/S0924-4247(01)00798-1ISI: 000176297000012OAI: oai:DiVA.org:kth-21622DiVA: diva2:340320
QC 201005252010-08-102010-08-10Bibliographically approved