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Non-destructive pulsed technique to characterize functional properties of micromachined bulk PZT
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0001-8774-9302
2001 (English)In: Ferroelectrics (Print), ISSN 0015-0193, E-ISSN 1563-5112, Vol. 263, no 1-4, 1487-1492 p.Article in journal (Refereed) Published
Abstract [en]

In this report, a non-destructive pulsed technique is presented to characterize all relevant properties of machined bulk PZT material. The proposed method is based on recording of the transient current as response on the short voltage pulse applied to the ferroelectric acoustic element. This new promising experimental technique makes it possible to measure mechanical and electrical properties fast, reliably and reproducibly. Among other results we can obtain electromechanical coupling coefficient, dielectric loss factor tan 8, mechanical quality factor Q, dielectric constant, capacitance, resonant frequency and Curie temperature T-c. The temperature dependence of above mentioned parameters can be studied as well very easily.

Place, publisher, year, edition, pages
2001. Vol. 263, no 1-4, 1487-1492 p.
Keyword [en]
non-destructive pulsed technique, microelectromechanical systems, PZT, material properties, fatigue
Identifiers
URN: urn:nbn:se:kth:diva-21782ISI: 000177215600028OAI: oai:DiVA.org:kth-21782DiVA: diva2:340480
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

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Khartsev, Sergiy

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