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On the nature of ion implantation induced dislocation loops in 4H-silicon carbide
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-8760-1137
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2002 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 92, no 5, 2501-2505 p.Article in journal (Refereed) Published
Abstract [en]

Transmission electron microscopy was used to investigate B-11, C-12, N-14, Al-27, Si-28, and Ar-37 ion-implanted 4H-SiC epilayers and subsequent defect formation after high temperature annealing. During the annealing process extrinsic dislocation loops of interstitial type are formed on the SiC basal plane with a depth distribution roughly corresponding to the distribution of the implanted ions. The investigation reveals that in samples where the implanted ions are substituting for a position in the silicon sublattice, generating an excess of interstitial silicon, the dislocation loops are more readily formed than in a sample implanted with an ion substituting for carbon.

Place, publisher, year, edition, pages
2002. Vol. 92, no 5, 2501-2505 p.
Keyword [en]
silicon-carbide, defects, irradiation, evolution, diffusion, alpha, tem
URN: urn:nbn:se:kth:diva-21836DOI: 10.1063/1.1499749ISI: 000177548500045OAI: diva2:340534
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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