A high-stroke, high-pressure electrostatic actuator for valve applications
2002 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 100, no 03-feb, 264-271 p.Article in journal (Refereed) Published
This paper presents a novel large-stroke electrostatic valve actuator for high-pressure applications. The combination of pressure balancing and flexible electrode structures ensures large flow gaps at a low actuation voltage. A simulation tool was built to evaluate the design parameters. Design specific, as well as general optimisations are performed. The model shows a 5.6 times (theoretical) performance improvement compared to earlier designs. A micromachined test structure was fabricated and evaluated. Measurement results are presented and discussed.
Place, publisher, year, edition, pages
2002. Vol. 100, no 03-feb, 264-271 p.
electrostatic, microvalve, actuator
IdentifiersURN: urn:nbn:se:kth:diva-21883DOI: 10.1016/S0924-4247(02)00070-5ISI: 000177934300020OAI: oai:DiVA.org:kth-21883DiVA: diva2:340581
QC 201005252010-08-102010-08-10Bibliographically approved