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A high-stroke, high-pressure electrostatic actuator for valve applications
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-8248-6670
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2002 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 100, no 03-feb, 264-271 p.Article in journal (Refereed) Published
Abstract [en]

This paper presents a novel large-stroke electrostatic valve actuator for high-pressure applications. The combination of pressure balancing and flexible electrode structures ensures large flow gaps at a low actuation voltage. A simulation tool was built to evaluate the design parameters. Design specific, as well as general optimisations are performed. The model shows a 5.6 times (theoretical) performance improvement compared to earlier designs. A micromachined test structure was fabricated and evaluated. Measurement results are presented and discussed.

Place, publisher, year, edition, pages
2002. Vol. 100, no 03-feb, 264-271 p.
Keyword [en]
electrostatic, microvalve, actuator
Identifiers
URN: urn:nbn:se:kth:diva-21883DOI: 10.1016/S0924-4247(02)00070-5ISI: 000177934300020OAI: oai:DiVA.org:kth-21883DiVA: diva2:340581
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

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van der Wijngaart, WouterStemme, Göran

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