Change search
ReferencesLink to record
Permanent link

Direct link
A base-collector architecture for SiGeHBTs using low-temperature CVD epitaxy combined with chemical-mechanical polishing
Show others and affiliations
2002 (English)In: Physica Scripta, ISSN 0031-8949, E-ISSN 1402-4896, Vol. T101, 64-66 p.Article in journal (Refereed) Published
Abstract [en]

A new collector technology intended for an integrated high-speed SiGe heterojunction bipolar transistor (HBT) is reported. The collector was fabricated by selective epitaxial growth (SEG) using chemical vapor deposition at 770degreesC under reduced pressure (20 torr) using SiH2Cl2 as silicon precursor and PH3 as n-type dopant source. Chemical-mechanical polishing (CMP) was applied to the overgrown SEG collector in order to achieve a smooth surface in level with the surrounding oxide. Finally, a SiGe base doped with boron was deposited using non-selective epitaxial growth (NSEG) at 650degreesC. The topography of the collector is inspected after each process step by atomic force microscopy and the topography of the completed collector/base stack indicates that this structure is promising for fabrication of the emitter window. A further advantage with the CMP procedure is the elimination of phosphorous segregation as evidenced by secondary ion mass spectroscopy of the base-collector stack.

Place, publisher, year, edition, pages
2002. Vol. T101, 64-66 p.
Keyword [en]
bipolar-transistors, leakage currents, silicon, growth
URN: urn:nbn:se:kth:diva-22076ISI: 000179465600017OAI: diva2:340774
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

Open Access in DiVA

No full text

Search in DiVA

By author/editor
Wang, Yong-Bin
By organisation
Microelectronics and Information Technology, IMIT
In the same journal
Physica Scripta

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 9 hits
ReferencesLink to record
Permanent link

Direct link