Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Considerations of pad compensation for on-wafer high frequency characterization of MOSFETs
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0001-6705-1660
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
2002 (English)In: Physica Scripta, ISSN 0031-8949, E-ISSN 1402-4896, Vol. T101, 70-74 p.Conference paper, Published paper (Refereed)
Abstract [en]

When on-wafer high frequency characterization of MOSFETs is performed, influences of the substrate coupling arising from metal bonding pads have to be considered in order to de-embed the characteristics of intrinsic transistors at high frequencies. In this work we examine different metal pad configurations used for the de-embedding procedure, i.e. pad compensation. Lumped circuit models are used to account for the effects of the metal pads and the substrate beneath. Good agreement is found between the Y-parameters of the proposed models and the measured data up to 18 GHz. With the guidance of the models we discuss designs of metal pad configurations, substrate resistivity substrate isolation and layout of MOSFETs in order to improve the accuracy of the pad compensation.

Place, publisher, year, edition, pages
2002. Vol. T101, 70-74 p.
Identifiers
URN: urn:nbn:se:kth:diva-22077ISI: 000179465600019OAI: oai:DiVA.org:kth-22077DiVA: diva2:340775
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

Open Access in DiVA

No full text

Authority records BETA

Hellberg, Per-Erik

Search in DiVA

By author/editor
Hellberg, Per-ErikZhang, Shi-Li
By organisation
Microelectronics and Information Technology, IMIT
In the same journal
Physica Scripta

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 14 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf