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A charge sheet model for MOSFETs with an abrupt retrograde channel - Part II. Charges and intrinsic capacitances
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0001-6705-1660
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
2002 (English)In: Solid-State Electronics, ISSN 0038-1101, E-ISSN 1879-2405, Vol. 46, no 12, 2217-2225 p.Article in journal (Refereed) Published
Abstract [en]

The 16 intrinsic capacitance components related to the gate, source, drain and depletion charges are examined for MOSFETs with an ideally abrupt retrograde doping profile in the channel, based on the analytical solutions for the drain current and body charge in the preceding paper. Though lengthy and complex in their final mathematical expressions, analytical solutions for the capacitances can be obtained. The validity of the analytical solutions is confirmed by comparing the modeling results with simulation data obtained using numerical calculations. The inclusion of an intrinsic surface layer in the channel merely causes a simple voltage shift for the capacitances that are not associated with the depletion charge or body bias, similarly to the variation of the drain current shown in the preceding paper. For the capacitances that are related to the depletion charge or body bias, there is not only a parallel voltage shift with an amount commensurate to the shift in drain current as well as in the other capacitances, but also a decrease in their values. This decrease depends on the thickness of the intrinsic surface layer and it amounts to 25% for a surface layer of 30 nm thickness.

Place, publisher, year, edition, pages
2002. Vol. 46, no 12, 2217-2225 p.
Keyword [en]
MOSFET, charge-sheet model, retrograde structure, intrinsic charge, intrinsic capacitance, transistors
Identifiers
URN: urn:nbn:se:kth:diva-22091ISI: 000179517100029OAI: oai:DiVA.org:kth-22091DiVA: diva2:340789
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Hellberg, Per-Erik

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