Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Dislocation loop evolution in ion implanted 4H-SiC
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-8760-1137
Show others and affiliations
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 93, no 11, 9395-9397 p.Article in journal (Refereed) Published
Abstract [en]

4H-SiC epilayers, were implanted with Al-27 in doses from 1.3 X 10(14) cm(-2) to 7.8 X 10(14) cm(-2). Dislocation loop formation after high-temperature annealing was studied by plan-view transmission electron microscopy And high-resolution cross-sectional transmission electron microscopy. The total dislocation loop area was found to vary linearly with the implanted dose. For each dose, the total dislocation loop area, reflecting the amount of interstitial bound to loops, stays constant both with prolonged annealing and increasing temperature. Simultaneously, the average radius of the dislocation loops increases, indicating a process similar to Ostwald ripening.

Place, publisher, year, edition, pages
2003. Vol. 93, no 11, 9395-9397 p.
Keyword [en]
carbide
Identifiers
URN: urn:nbn:se:kth:diva-22531DOI: 10.1063/1.1569027ISI: 000183144300088OAI: oai:DiVA.org:kth-22531DiVA: diva2:341229
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Hallén, Anders.

Search in DiVA

By author/editor
Hallén, Anders.
By organisation
Microelectronics and Information Technology, IMIT
In the same journal
Journal of Applied Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 30 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf