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Capillary nozzles for liquid-jet laser-plasma x-ray sources
KTH, Superseded Departments, Physics.ORCID iD: 0000-0003-2723-6622
2003 (English)In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 74, no 8, 3881-3882 p.Article in journal (Refereed) Published
Abstract [en]

We describe a method to fabricate tapered glass nozzles suitable for liquid-jet-target generation in laser-plasma soft x-ray and extreme ultraviolet sources. In the method, a tapered nozzle is formed as an integral part of a flexible capillary glass tubing. The method makes use of inert materials, extending the possible choice of target liquids compared to current nozzles. It also provides flexibility as regards nozzle diameter and pressure, thereby allowing optimization of the target size and extending the range of applicability for the liquid-jet-target laser plasmas.

Place, publisher, year, edition, pages
2003. Vol. 74, no 8, 3881-3882 p.
Keyword [en]
target, generation, euv
Identifiers
URN: urn:nbn:se:kth:diva-22693DOI: 10.1063/1.1589156ISI: 000184346600048OAI: oai:DiVA.org:kth-22693DiVA: diva2:341391
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

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Hertz, Hans M.

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