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Target optimization of a water-window liquid-jet laser-plasma source
KTH, Superseded Departments, Physics.ORCID iD: 0000-0003-2723-6622
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 94, no 6, 3717-3721 p.Article in journal (Refereed) Published
Abstract [en]

We optimize the water-window x-ray flux and debris deposition for a liquid-jet laser plasma source by varying both the target diameter and the jet material. For two target liquids, methanol and ethanol, measurements of the lambda = 3.37 nm C vi x-ray flux and the debris deposition rates are presented as function of the jet diameter. It is shown that the effective carbon debris deposition is more than I order of magnitude smaller for methanol, while the x-ray flux is reduced only similar to40%. The reduction in carbon debris deposition may be explained by reactive ion etching by oxygen from the plasma. Thus, the methanol water-window source may be operated at a 5-10X higher flux without increasing the debris deposition. The optimization potentially allows a reduction of the exposure time of compact soft x-ray microscopy or other water-window applications based on such sources without increasing damage to sensitive x-ray optics.

Place, publisher, year, edition, pages
2003. Vol. 94, no 6, 3717-3721 p.
Keyword [en]
x-ray generation, droplet-target, spectroscopy, microscopy, emission, design, films, euv
URN: urn:nbn:se:kth:diva-22822DOI: 10.1063/1.1602571ISI: 000185419600005OAI: diva2:341520
QC 20100525Available from: 2010-08-10 Created: 2010-08-10Bibliographically approved

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Hertz, Hans M.
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