Microfabrication of saw-tooth refractive x-ray lenses in low-Z materials
2003 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 13, no 5, 714-720 p.Article in journal (Refereed) Published
Saw-tooth x-ray refractive lenses have been fabricated in silicon, epoxy and diamond. Silicon lenses were made by anisotropic wet etching of single crystalline silicon. Epoxy lenses were moulded from silicon masters. Diamond lenses were replicated by. chemical vapour deposition on silicon masters and subsequent sacrificial etching of silicon. Beryllium saw-tooth test structures were embossed using a diamond master. Silicon and epoxy lenses gave sub-micron focal lines and provided gains of up to 40 when tested in a synchrotron set-up. Focal lengths ranged from 0.33 to 0.61 m for x-ray energies between 14 and 30 keV.
Place, publisher, year, edition, pages
2003. Vol. 13, no 5, 714-720 p.
silicon, transmission, orientation, gratings, behavior
IdentifiersURN: urn:nbn:se:kth:diva-22856ISI: 000185656000025OAI: oai:DiVA.org:kth-22856DiVA: diva2:341554
QC 201005252010-08-102010-08-10Bibliographically approved