A lift force sensor with integrated hot-chips for wide range flow measurements
2003 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 109, no 02-jan, 120-130 p.Article in journal (Refereed) Published
The lift force gas flow sensor uses the force normal to the fluid flow to measure the flow velocity. Two thin plates mounted at an angle are deflected when they are subjected to fluid flow. By combining the mechanical lift force sensor and a thermal hot-chip sensor we now have obtained a sensor capable of high sensitivity in both high and low flows. Both the thermal and the non-thermal parts of the flow sensor have non-linear flow dependencies leading to a flow dependent sensitivity where the hot-chip part has its highest sensitivity for low flows and the lift force part has its highest sensitivity for high flows. When connected in an acceleration insensitive bridge configuration, the lift force sensor is basically insensitive to the direction of the flow but combined with a dual hot-chip configuration, bi-directionality has been accomplished. Here this has been shown by measuring the magnitude using the mechanical lift force principle and using a dual hot-chip configuration for direction detection. This is demonstrated in a simulated ventilator measurement.
Place, publisher, year, edition, pages
2003. Vol. 109, no 02-jan, 120-130 p.
gas flow sensor, lift force, anemometer, piezoresistive
IdentifiersURN: urn:nbn:se:kth:diva-23032DOI: 10.1016/j.sna.2003.05.003ISI: 000187361000018OAI: oai:DiVA.org:kth-23032DiVA: diva2:341730
QC 201005252010-08-102010-08-10Bibliographically approved