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Stabilization of liquified-inert-gas jets for laser-plasma generation
KTH, Superseded Departments, Physics.
KTH, Superseded Departments, Physics.
KTH, Superseded Departments, Physics.
KTH, Superseded Departments, Physics.ORCID iD: 0000-0003-2723-6622
2004 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 95, no 8, 4432-4437 p.Article in journal (Refereed) Published
Abstract [en]

We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser-plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser-plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle.

Place, publisher, year, edition, pages
2004. Vol. 95, no 8, 4432-4437 p.
Keyword [en]
x-ray source, liquid-xenon, droplet-target, euv lithography, debris, evaporation, stability, hydrogen, surface
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-23295DOI: 10.1063/1.1687037ISI: 000220586100084Scopus ID: 2-s2.0-2342633907OAI: oai:DiVA.org:kth-23295DiVA: diva2:341993
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

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Hertz, Hans M.

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