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Ion transmission and characterization of ordered nanoporous alumina
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-8760-1137
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2004 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 222, no 04-mar, 593-600 p.Article in journal (Refereed) Published
Abstract [en]

Ordered nanoporous alumina samples with a pore diameter of 70 nm, an array period of 100 nm and several thicknesses were considered as possible masks for pattern transfer by MeV ion lithography. A simple procedure for the sample alignment using a 2 MeV He+ beam was utilized. The energy distributions of transmitted ions as well as backscattering spectra were studied in aligned and non-aligned orientations. The best transmission, comparable to the relative surface area covered by pores, was reached for 2 mum thick samples and was independent on ion species. Although the transmission for thicker membranes was generally lower, it significantly depended on the quality of each individual sample. The presented ion beam technique can therefore be used as a tool for the characterization of porous materials. The acceptance angle for transmission through pores and the effective atomic density of samples can be obtained from the experimental data and it is shown that nanoporous alumina can be used as a mask for MeV ion lithography.

Place, publisher, year, edition, pages
2004. Vol. 222, no 04-mar, 593-600 p.
Keyword [en]
nanomaterials, anodic alumina, RBS, transmission, characterization, ion lithography, pattern transfer, 2-step replication, anodic alumina, porous silicon, implantation, arrays, films
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-23630DOI: 10.1016/j.nimb.2004.03.072ISI: 000223121800030Scopus ID: 2-s2.0-3142758563OAI: oai:DiVA.org:kth-23630DiVA: diva2:342329
Note

QC 20100525 QC 20110926

Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-06-08Bibliographically approved

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Hallén, Anders.

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