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Novel RF MEMS Mechanically Tunable Dielectric Phase Shifter
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology.
2008 (English)In: 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES: VOLS 1 AND 2, Pasadene, CA, USA: IEEE , 2008, 643-644 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents three variations of novel single-stage digital passive RF MEMS phase shifters. Relative phase shift is achieved by moving a micromachined lambda/2-long dielectric block by a MEMS actuator above a 3dimensional micromachined coplanar waveguide. The relative phase-shift of a single stage is determined by an artificially tailor-made dielectric constant of the block which is designed by a periodically etched pattern. The devices are fabricated and assembled by wafer-scale processes using bulk and surface micromachining. The measurement results show that already the first prototypes of the phase-shifter designs at the nominal frequency of 77 GHz have both in the up and in the down state a return loss better than -25 dB for 45 degrees and 300 phase shifter and better than -12 dB for 15 degrees phase-shifter with an insertion loss better than -0.9 dH at 5 GHz bandwidth. The phase shifters also perform well from 10-100 GHz with the return loss better than -10 dB, an insertion loss of less than -1.5 dB and a fairly linear phase-shift for the whole frequency range.

Place, publisher, year, edition, pages
Pasadene, CA, USA: IEEE , 2008. 643-644 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24317ISI: 000263160700341Scopus ID: 2-s2.0-58049127298ISBN: 978-1-4244-2119-0 (print)OAI: oai:DiVA.org:kth-24317DiVA: diva2:346479
Conference
33rd International Conference on Infrared, Millimeter and Terahertz Waves Pasadena, CA, SEP 15-19, 2008
Note
QC 20111130Available from: 2010-09-01 Created: 2010-09-01 Last updated: 2011-11-30Bibliographically approved

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Stemme, Göran

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