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Wafer-Scale Manufacturing of Robust Trimorph Bulk SMA Microactuators
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-6443-878X
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
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2008 (English)In: ACTUATOR 08, CONFERENCE PROCEEDINGS / [ed] Borgmann H., 2008, p. 382-385Conference paper, Published paper (Refereed)
Abstract [en]

This paper demonstrates the concept of wafer-level fabrication and integration of robust bulk SMA microactuators based on selective adhesive bonding of cold-rolled SMA sheets to silicon wafers. Contact printing of an adhesive polymer ensures a selective bonding when transferring full SMA sheets to silicon structures on a patterned wafer. The induced stress of a thin dielectric film deposited on top of the SMA sheet ensures a stable and built-in reset mechanism of the actuators. The trimorph microactuators can be actuated by indirect resistive heating using electrical current through a thin metal film. We report on the successful wafer-scale fabrication of actuator cantilevers and their characteristics. First test cantilevers show a cold-state deflection of 300 mu m which, however, is limited by the silicon substrate. Upon heating, the cantilever shows a stroke of approx. 80 mu m.

Place, publisher, year, edition, pages
2008. p. 382-385
Keyword [en]
SMA, microactuators, wafer-level integration, adhesive bonding
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24315ISI: 000270938400080OAI: oai:DiVA.org:kth-24315DiVA, id: diva2:346515
Conference
11th International Conference on New Actuators/5th International Exhibition on Smart Actuators and Drive Systems Bremen, GERMANY, JUN 09-11, 2008
Note
QC 20110203Available from: 2010-09-01 Created: 2010-09-01 Last updated: 2011-02-03Bibliographically approved

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Sandström, NiklasStemme, Göranvan der Wijngaart, Wouter

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CiteExportLink to record
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Citation style
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