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A MICROMACHINED KMFE GATE VALVE FOR HIGH-FLOW PRESSURE REGULATION APPLICATIONS
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-8248-6670
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2003 (English)In: 12th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems Conference (IEEE TRANSDUCERS 2003), NEW YORK: IEEE conference proceedings, 2003, Vol. 2, 1931-1934 p.Conference paper, Published paper (Refereed)
Abstract [en]

Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.

Place, publisher, year, edition, pages
NEW YORK: IEEE conference proceedings, 2003. Vol. 2, 1931-1934 p.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24803DOI: 10.1109/SENSOR.2003.1217170ISI: 000184567300485ISBN: 0-7803-7731-1 (print)OAI: oai:DiVA.org:kth-24803DiVA: diva2:354459
Conference
12th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems Conference (IEEE TRANSDUCERS 2003), BOSTON, MA, USA, 08-12 Jun, 2003
Note

QC 20101001

Available from: 2010-10-01 Created: 2010-09-27 Last updated: 2015-06-03Bibliographically approved

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fulltext(286 kB)66 downloads
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van der Wijngaart, WouterStemme, Göran

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