A MICROMACHINED KMFE GATE VALVE FOR HIGH-FLOW PRESSURE REGULATION APPLICATIONS
2003 (English)In: 12th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems Conference (IEEE TRANSDUCERS 2003), NEW YORK: IEEE conference proceedings, 2003, Vol. 2, 1931-1934 p.Conference paper (Refereed)
Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.
Place, publisher, year, edition, pages
NEW YORK: IEEE conference proceedings, 2003. Vol. 2, 1931-1934 p.
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-24803DOI: 10.1109/SENSOR.2003.1217170ISI: 000184567300485ISBN: 0-7803-7731-1OAI: oai:DiVA.org:kth-24803DiVA: diva2:354459
12th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems Conference (IEEE TRANSDUCERS 2003), BOSTON, MA, USA, 08-12 Jun, 2003
QC 201010012010-10-012010-09-272015-06-03Bibliographically approved