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Robust, large-deflection, in-plane thermal polymer V-shaped actuators
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0002-9327-2544
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0002-2650-0121
KTH, Superseded Departments, Signals, Sensors and Systems.
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2004 (English)In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, New York: IEEE , 2004, 510-513 p.Conference paper, Published paper (Refereed)
Abstract [en]

We present the design, fabrication and characteristics of the first in-plane V-shaped polymer actuator. Several different designs are evaluated and compared with each other. The intended application for this actuator is optical component alignment.

Place, publisher, year, edition, pages
New York: IEEE , 2004. 510-513 p.
Series
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
Keyword [en]
Electrical & Electronic, Engineering, Mechanical, Instruments & Instrumentation, Optics
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24796DOI: 10.1109/MEMS.2004.1290634ISI: 000189435200127Scopus ID: 2-s2.0-3042784613ISBN: 0-7803-8265-X (print)OAI: oai:DiVA.org:kth-24796DiVA: diva2:354910
Conference
17th IEEE International Conference on Micro Electro Mechanical Systems Location: Maastricht, NETHERLANDS Date: JAN 25-29, 2004
Note
QC 20101005Available from: 2010-10-05 Created: 2010-09-27 Last updated: 2011-11-11Bibliographically approved

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Haasl, SjoerdSohlström, HansStemme, Göran

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