A seat microvalve nozzle for optimal gas flow capacity at large controlled pressure
2004 (English)In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), IEEE conference proceedings, 2004, 233-236 p.Conference paper (Refereed)
Seat microvalves are the most common microvalve type for gas flow control. This paper presents a general method for optimising the flow capacity of a seat valve nozzle and diminishing the requirements on the valve actuator's stroke-length. Geometrical analysis and finite element (FE) simulations show that for controlling large gas flow at elevated pressure, the optimal nozzle design in terms of flow capacity for a given actuator performance is a multiple-orifice arrangement with miniaturised circular nozzles. Experimental results support the design introduced in this paper.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2004. 233-236 p.
, Proceedings: IEEE micro electro mechanical systems workshop, ISSN 1084-6999
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-24793DOI: 10.1109/MEMS.2004.1290565ISI: 000189435200058ScopusID: 2-s2.0-3042697034ISBN: 0-7803-8265-XOAI: oai:DiVA.org:kth-24793DiVA: diva2:354950
The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004)
QC 201010052010-10-052010-09-272015-10-07Bibliographically approved