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Small footprint knife gate microvalves for large flow control
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-9327-2544
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
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2005 (English)In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005), NEW YORK: IEEE conference proceedings, 2005, 329-332 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper introduces the first area-optimized micromachined knife gate microvalve. In comparison to recent microvalves the pressure-flow performance is increased using out-of-plane actuators and an out-of-plane orifice. Three different actuator-gate designs and their fabrication are described. The valve features integrated therinal silicon/aluminum bimorph actuators where the aluminum layer forins the resistive heater as well as the bimorph material. The characterization of the actuators and of the pressure-flow perfon-nance is presented. The valve allows a flow change of Delta Q=3.4 1/min at 100 kPa on an active chip area of only 2.3 x 3.7 mm(2).

Place, publisher, year, edition, pages
NEW YORK: IEEE conference proceedings, 2005. 329-332 p.
Keyword [en]
microvalves, micropneumatics, microfluidics
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24786DOI: 10.1109/SENSOR.2005.1496423ISI: 000232189100080Scopus ID: 2-s2.0-27544481275OAI: oai:DiVA.org:kth-24786DiVA: diva2:355002
Conference
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005)
Note

QC 20101005

Available from: 2010-10-05 Created: 2010-09-27 Last updated: 2015-06-02Bibliographically approved

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Haasl, Sjoerdvan der Wijngaart, WouterStemme, Göran

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Braun, StefanHaasl, SjoerdSadoon, Samirvan der Wijngaart, WouterStemme, Göran
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Electrical Engineering, Electronic Engineering, Information Engineering

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