Small footprint knife gate microvalves for large flow control
2005 (English)In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005), NEW YORK: IEEE conference proceedings, 2005, 329-332 p.Conference paper (Refereed)
This paper introduces the first area-optimized micromachined knife gate microvalve. In comparison to recent microvalves the pressure-flow performance is increased using out-of-plane actuators and an out-of-plane orifice. Three different actuator-gate designs and their fabrication are described. The valve features integrated therinal silicon/aluminum bimorph actuators where the aluminum layer forins the resistive heater as well as the bimorph material. The characterization of the actuators and of the pressure-flow perfon-nance is presented. The valve allows a flow change of Delta Q=3.4 1/min at 100 kPa on an active chip area of only 2.3 x 3.7 mm(2).
Place, publisher, year, edition, pages
NEW YORK: IEEE conference proceedings, 2005. 329-332 p.
microvalves, micropneumatics, microfluidics
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-24786DOI: 10.1109/SENSOR.2005.1496423ISI: 000232189100080ScopusID: 2-s2.0-27544481275OAI: oai:DiVA.org:kth-24786DiVA: diva2:355002
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005)
QC 201010052010-10-052010-09-272015-06-02Bibliographically approved