Single-use microfluidic pumps and valves based on a thermally responsive PDMS composite: Technical Digest
2005 (English)In: MEMS 2005 Miami: Technical Digest, IEEE , 2005, 690-693 p.Conference paper (Refereed)
In this work we present active microfluidic liquid handling integrated on-chip with no need for external actuators. The concept is based on a temperature sensitive silicone elastomer composite, consisting of PDMS and expandable microspheres. We successfully fabricated single-use microfluidic pumps and displaced liquids in the range of nanoliters even against counter pressures up to 100kPa. Moreover, liquid flow in a microchannel was entirely blocked by means of integrated valves. The valves could withstand pressures up to 140kPa. The devices were fabricated entirely from low cost materials and allow wafer-level processing to be used.
Place, publisher, year, edition, pages
IEEE , 2005. 690-693 p.
, Proceedings: IEEE Micro Electro Mechanical Systems Workshop, ISSN 1084-6999
Actuators, Elastomers, Fluid dynamics, Microelectromechanical devices
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-24779ISI: 000228430000171ScopusID: 2-s2.0-26844452984ISBN: 0-7803-8732-5OAI: oai:DiVA.org:kth-24779DiVA: diva2:355345
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Miami Beach, FL, Jan 30-Feb 03, 2005
QC 201010062010-10-062010-09-272014-12-02Bibliographically approved