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Single-use microfluidic pumps and valves based on a thermally responsive PDMS composite: Technical Digest
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
2005 (English)In: MEMS 2005 Miami: Technical Digest, IEEE , 2005, 690-693 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this work we present active microfluidic liquid handling integrated on-chip with no need for external actuators. The concept is based on a temperature sensitive silicone elastomer composite, consisting of PDMS and expandable microspheres. We successfully fabricated single-use microfluidic pumps and displaced liquids in the range of nanoliters even against counter pressures up to 100kPa. Moreover, liquid flow in a microchannel was entirely blocked by means of integrated valves. The valves could withstand pressures up to 140kPa. The devices were fabricated entirely from low cost materials and allow wafer-level processing to be used.

Place, publisher, year, edition, pages
IEEE , 2005. 690-693 p.
Series
Proceedings: IEEE Micro Electro Mechanical Systems Workshop, ISSN 1084-6999
Keyword [en]
Actuators, Elastomers, Fluid dynamics, Microelectromechanical devices
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24779ISI: 000228430000171Scopus ID: 2-s2.0-26844452984ISBN: 0-7803-8732-5 (print)OAI: oai:DiVA.org:kth-24779DiVA: diva2:355345
Conference
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Miami Beach, FL, Jan 30-Feb 03, 2005
Note

QC 20101006

Available from: 2010-10-06 Created: 2010-09-27 Last updated: 2014-12-02Bibliographically approved

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Stemme, Göran

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Output format
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