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A low-temperature thermopneumatic gas bubble valve
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
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2006 (English)In: 19th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2006), New York: IEEE conference proceedings, 2006, 198-201 p.Conference paper, Published paper (Refereed)
Abstract [en]

We introduce a novel type of actuation for microvalves, in which a trapped air bubble functions as the thermally controlled volume displacing element. The pressure of the trapped air pocket is controlled thermally using a resistive heater. The volume displacement is determined by the liquid surface tension and the valve geometry. A fully functional demonstrator device was successfully fabricated and tested. The absence of moving mechanical parts, the electrical control of the valve, and the limited required actuation temperature make the actuator suitable for control of LSI fluidic networking in biotechnical applications.

Place, publisher, year, edition, pages
New York: IEEE conference proceedings, 2006. 198-201 p.
Series
PROCEEDINGS. IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN 1084-6999
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24774DOI: 10.1109/MEMSYS.2006.1627770ISI: 000236994500050Scopus ID: 2-s2.0-33750124462ISBN: 0-7803-9475-5 (print)OAI: oai:DiVA.org:kth-24774DiVA: diva2:355544
Conference
19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, TURKEY, 22-26 Jan, 2006
Note

QC 20101007

Available from: 2010-10-07 Created: 2010-09-27 Last updated: 2015-06-03Bibliographically approved

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van der Wijngaart, WouterStemme, Göran

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