Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Robust trimorph bulk SMA microactuators for batch manufacturing and integration
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
Show others and affiliations
2007 (English)In: The 14th IEEE International conference on Solid-State Sensors, Actuators and Microsystems Conference & EUROSENSORS XXI (IEEE TRANSDUCERS 2007), IEEE conference proceedings, 2007, 2191-2194 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper introduces the concept of batch micrufabrication and electrical contacting of bulk SMA nticroactuators. This concept addresses technical solutions for the main challenges related to using SMA actuators such as the necessary mechanical bias force, the difficult electrical contacting and the high power needed for actuation. We report on initial SMA-dielectric-metal trimorph test structures and their characteristics. The bias force is provided by a dielectric layer and the electrical contacting of the bulk SMA is avoided using indirect electrical heating via an additional metal layer. Three nun long beams can provide several hundreds of mu N and deflect several hundreds of mu m. The actuation power is reduced approx. 2.5 times compared to direct heating schemes.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2007. 2191-2194 p.
Keyword [en]
SMA, microactuators
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-24764DOI: 10.1109/SENSOR.2007.4300602ISI: 000249603700545Scopus ID: 2-s2.0-50049119613ISBN: 978-1-4244-0841-2 (print)OAI: oai:DiVA.org:kth-24764DiVA: diva2:356079
Conference
The 14th IEEE International conference on Solid-State Sensors, Actuators and Microsystems Conference & EUROSENSORS XXI (IEEE TRANSDUCERS 2007)
Note

QC 20101011

Available from: 2010-10-11 Created: 2010-09-27 Last updated: 2015-05-20Bibliographically approved

Open Access in DiVA

fulltext(374 kB)33 downloads
File information
File name FULLTEXT01.pdfFile size 374 kBChecksum SHA-512
55cc95511c8331eaff3bdb73e2b7ca14022de96eacf32f95f66a6bbe880586f2380f36dfa78228155084655f6058afb31e83ab97747802972fb951b83c6a7fcb
Type fulltextMimetype application/pdf

Other links

Publisher's full textScopusIEEEXplore

Authority records BETA

van der Wijngaart, WouterStemme, Göran

Search in DiVA

By author/editor
Braun, StefanIngvarsdóttir, Sveinbjörgvan der Wijngaart, WouterStemme, Göran
By organisation
Microsystem Technology (Changed name 20121201)
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 33 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 99 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf